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Item Details
| Title:
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SEMICONDUCTOR MICROMACHINING
FUNDAMENTALS AND TECHNOLOGY |
| By: |
S. A. Campbell, H. J. Lewerenz |
| Format: |
Hardback |
| List price:
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£563.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
0471980846 |
| ISBN 13: |
9780471980841 |
| Publisher: |
JOHN WILEY AND SONS LTD |
| Pub. date: |
27 March, 1998 |
| Pages: |
736 |
| Description: |
A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. |
| Synopsis: |
A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. The objective is to demonstrate the feasibility of structuring semiconductors for device technology and bridges fundamental research and marketed saleable devices, such as TVs and microwaves. Volume one concerns fundamental electrochemistry and physics and Volume two concerns techniques and industrial applications. |
| Illustrations: |
134 & 141 illustrations, 17 & 34 graphs, 7 & 18 tables |
| Publication: |
UK |
| Imprint: |
John Wiley & Sons Ltd |
| Returns: |
Returnable |
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