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Item Details
Title: ATOMIC LAYER DEPOSITION FOR SEMICONDUCTORS
By: Cheol Seong Hwang (Editor)
Format: Paperback

List price: £139.99
Our price: £118.99
Discount:
15% off
You save: £21.00
ISBN 10: 1489979433
ISBN 13: 9781489979438
Availability: Usually dispatched within 3-5 days.
 Delivery rates
Stock: Currently 1item in stock
Publisher: SPRINGER-VERLAG NEW YORK INC.
Pub. date: 23 August, 2016
Edition: Softcover reprint of the original 1st ed. 2014
Pages: 263
Description: This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.
Synopsis: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Illustrations: 89 black & white illustrations, 81 colour illustrations, 3 black & white
Publication: US
Imprint: Springer-Verlag New York Inc.
Returns: Returnable

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