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Item Details
Title: AMORPHOUS AND CRYSTALLINE INSULATING THIN FILMS - 1996
SYMPOSIUM HELD DECEMBER 2-4, 1996, BOSTON, MASSACHUSETTS, U.S.A.
Volume: Volume 446
By: Sorin Cristoloveanu (Editor), Roderick A. B. Devine (Editor), Yoshio Homma (Editor)
Format: Hardback

List price: £21.99


We currently do not stock this item, please contact the publisher directly for further information.

ISBN 10: 1558993509
ISBN 13: 9781558993501
Publisher: MATERIALS RESEARCH SOCIETY
Pub. date: 30 June, 1997
Series: MRS Proceedings
Pages: 440
Description: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Synopsis: This book is devoted to the continuing research and development of thin-dielectric films for optical and microelectronic applications. Although thermal SiO2 has been the dominant dielectric for thin films in microelectronic applications for many years, there is a growing need for low-dielectric constant materials for interlevel dielectrics (less capacitive cross-talk and reduced delay) and high-dielectric constant materials to minimize the space and maximize the capacitance of storage devices such as DRAMs. With the demands put forth by the microelectronics community, this field is expected to develop significantly in the near future. Also featured is the growing area involving the structure and characteriza-tion of buried a-SiO2 layers formed by O+ ion implantation or the Smart Cut Unibond(R) process. These techniques are evolving into viable methods for producing commercial silicon-on-insulator substrates for device applications requiring radiation hardness, high-speed and low-power performance, and high-temperature operation.
Publication: US
Imprint: Materials Research Society
Returns: Returnable
Some other items by this author:
AMORPHOUS INSULATING THIN FILMS: VOLUME 284 (HB)
ELECTRICAL CHARACTERIZATION OF SILICON-ON-INSULATOR MATERIALS AND DEVICES (HB)
ELECTRICAL CHARACTERIZATION OF SILICON-ON-INSULATOR MATERIALS AND DEVICES (PB)
FRONTIERS IN ELECTRONICS
FRONTIERS IN ELECTRONICS
FRONTIERS IN ELECTRONICS (HB)
FRONTIERS IN ELECTRONICS - PROCEEDINGS OF THE WORKSHOP ON FRONTIERS IN ELECTRONICS 2009 (HB)
FRONTIERS IN ELECTRONICS - SELECTED PAPERS FROM THE WORKSHOP ON FRONTIERS IN ELECTRONICS 2015 (WOFE-15) (HB)
FRONTIERS IN ELECTRONICS: SELECTED PAPERS FROM THE WORKSHOP ON FRONTIERS IN ELECTRONICS 2011 (WOFE-11) (HB)
FRONTIERS IN ELECTRONICS: SELECTED PAPERS FROM THE WORKSHOP ON FRONTIERS IN ELECTRONICS 2013 (WOFE-13) (HB)
FULLY DEPLETED SILICON-ON-INSULATORS
NANOCARBON MATERIALS AND DEVICES: VOLUME 1451 (HB)
STRUCTURE AND IMPERFECTIONS IN AMORPHOUS AND CRYSTALLINE SILICON DIOXIDE (HB)
THE PHYSICS AND TECHNOLOGY OF AMORPHOUS SIO2 (HB)
THE PHYSICS AND TECHNOLOGY OF AMORPHOUS SIO2 (PB)

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