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Item Details
| Title:
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TEMPERATURE MEASUREMENT DURING MILLISECOND ANNEALING
RIPPLE PYROMETRY FOR FLASH LAMP ANNEALERS |
| Volume: |
2015 |
| By: |
Denise Reichel |
| Format: |
Paperback |
| List price:
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£54.99 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
3658113871 |
| ISBN 13: |
9783658113872 |
| Publisher: |
SPRINGER FACHMEDIEN WIESBADEN |
| Pub. date: |
8 January, 2016 |
| Series: |
Matwerk |
| Pages: |
112 |
| Synopsis: |
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures. |
| Illustrations: |
77 colour illustrations, 7 black & white tables, biography |
| Publication: |
Germany |
| Imprint: |
Springer Spektrum |
| Returns: |
Returnable |
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