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Item Details
| Title:
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FUNDAMENTAL PRINCIPLES OF ENGINEERING NANOMETROLOGY
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| By: |
Richard Leach |
| Format: |
Hardback |
| List price:
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£105.00 |
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We believe that this item is permanently unavailable, and so we cannot source
it.
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| ISBN 10: |
0080964540 |
| ISBN 13: |
9780080964546 |
| Publisher: |
ELSEVIER SCIENCE & TECHNOLOGY |
| Pub. date: |
9 November, 2009 |
| Series: |
Micro & Nano Technologies |
| Pages: |
352 |
| Description: |
Presents the principles of engineering metrology applied to the micro- and nanoscale suitable for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. This work also covers basic metrological terminology, and the important topic of measurement uncertainty. |
| Synopsis: |
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. * Provides a basic introduction to measurement and instruments * Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force * Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) * Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) * Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge |
| Illustrations: |
Illustrations |
| Publication: |
UK |
| Imprint: |
William Andrew |
| Returns: |
Returnable |
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