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Item Details
| Title:
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DIRECTED SELF-ASSEMBLY OF BLOCK CO-POLYMERS FOR NANO-MANUFACTURING
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| By: |
Roel Gronheid (Editor), Paul Nealey (Editor) |
| Format: |
Hardback |
| List price:
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£163.00 |
| Our price: |
£146.70 |
| Discount: |
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| You save:
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£16.30 |
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| ISBN 10: |
0081002505 |
| ISBN 13: |
9780081002506 |
| Availability: |
Usually dispatched within 3-5 days.
 Delivery
rates
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| Stock: |
Currently 1item in stock |
| Publisher: |
ELSEVIER SCIENCE & TECHNOLOGY |
| Pub. date: |
3 August, 2015 |
| Series: |
Woodhead Publishing Series in Electronic and Optical Materials |
| Pages: |
328 |
| Synopsis: |
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques. |
| Publication: |
UK |
| Imprint: |
Woodhead Publishing Ltd |
| Returns: |
Non-returnable |
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