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Item Details
| Title:
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RF POWER FOR INDUSTRIAL APPLICATIONS
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| By: |
Louis E. Frenzel, Thomas A. Adamson |
| Format: |
Hardback |
| List price:
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£115.99 |
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We believe that this item is permanently unavailable, and so we cannot source
it.
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| ISBN 10: |
0130965774 |
| ISBN 13: |
9780130965776 |
| Publisher: |
PEARSON EDUCATION (US) |
| Pub. date: |
21 May, 2003 |
| Pages: |
288 |
| Description: |
Focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power. This book is useful for 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments. |
| Synopsis: |
For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power. This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others. This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge. |
| Illustrations: |
Illustrations |
| Publication: |
US |
| Imprint: |
Prentice Hall |
| Returns: |
Returnable |
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Ramadan and Eid al-Fitr
A celebratory, inclusive and educational exploration of Ramadan and Eid al-Fitr for both children that celebrate and children who want to understand and appreciate their peers who do.
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