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Item Details
| Title:
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RAPID THERMAL PROCESSING OF SEMICONDUCTORS
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| By: |
Victor E. Borisenko, Peter J. Hesketh |
| Format: |
Hardback |
| List price:
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£179.99 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
0306450542 |
| ISBN 13: |
9780306450549 |
| Publisher: |
SPRINGER SCIENCE+BUSINESS MEDIA |
| Pub. date: |
31 May, 1997 |
| Edition: |
1997 ed. |
| Series: |
Microdevices |
| Pages: |
358 |
| Description: |
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. |
| Synopsis: |
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field. |
| Illustrations: |
XXII, 358 p. |
| Publication: |
US |
| Imprint: |
Kluwer Academic/Plenum Publishers |
| Returns: |
Returnable |
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