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Item Details
| Title:
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PLASMA PROCESSING OF SEMICONDUCTORS
PROCEEDINGS OF THE NATO ADVANCED STUDY INSTITUTE, CHATEAU DE BONAS, FRANCE, 17-28 JUNE 1996 |
| By: |
P. F. Williams (Editor) |
| Format: |
Hardback |
| List price:
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£382.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
0792345673 |
| ISBN 13: |
9780792345671 |
| Publisher: |
KLUWER ACADEMIC PUBLISHERS |
| Pub. date: |
31 May, 1997 |
| Edition: |
1997 ed. |
| Series: |
NATO Science Series E: v. 336 |
| Pages: |
623 |
| Description: |
Proceedings of the NATO Advanced Study Institute, Chateau de Bonas, France, 17-28 June 1996 |
| Synopsis: |
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge. |
| Illustrations: |
biography |
| Publication: |
US |
| Imprint: |
Kluwer Academic Publishers |
| Returns: |
Returnable |
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