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Item Details
Title:
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MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING
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By: |
Craig R. Friedrich (Editor), Yuli Vladimirsky (Editor) |
Format: |
Paperback |
List price:
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£110.00 |
We believe that this item is permanently unavailable, and so we cannot source
it.
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ISBN 10: |
0819429716 |
ISBN 13: |
9780819429711 |
Publisher: |
SPIE PRESS |
Pub. date: |
1 January, 1998 |
Series: |
Proceedings of SPIE v. 3512 |
Pages: |
454 |
Description: |
This work contains papers on materials and device characterization in micromachining. Subjects covered include the characterization by scanning probe microscopy and materials characterization such as the tensile properties of LIGA nickel. |
Illustrations: |
index |
Publication: |
US |
Imprint: |
SPIE Press |
Returns: |
Returnable |
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