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Item Details
Title: MICRO- AND NANOTECHNOLOGY
MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS IV
By: Jung-Chih Chiao, Alex J. Hariz, David V. Thiel
Format: Paperback

List price: £94.50


We believe that this item is permanently unavailable, and so we cannot source it.

ISBN 10: 0819475211
ISBN 13: 9780819475213
Publisher: SPIE PRESS
Pub. date: 23 January, 2009
Series: Proceedings of SPIE v. 7269
Illustrations: Illustrations
Publication: US
Imprint: SPIE Press
Returns: Returnable
Some other items by this author:
BIOMATERIALS FOR MEMS
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DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS II (PB)
DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, AND PHOTONICS IV (PB)
DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS, AND NANOTECHNOLOGY IV (PB)
ELECTRONICS AND STRUCTURES FOR MEMS II (PB)
INTRODUCTION TO MEMS (PB)
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III (PB)
MICRO- AND NANOTECHNOLOGY (PB)
MICRO- AND NANOTECHNOLOGY (PB)
MICROELECTRONICS (PB)
MICROELECTRONICS (PB)
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XI (PB)
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIII (PB)
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIV (PB)
MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS V AND MICROFABRICATION PROCESS TECHNOLOGY XII (PB)
OPTICAL MICRO AND NANO TECHNOLOGY (HB)
RESEARCH METHODS FOR ENGINEERS (HB)
RESEARCH METHODS FOR ENGINEERS (PB)
SMART SENSORS, ACTUATORS AND MEMS (PB)
SMART SENSORS, ACTUATORS, AND MEMS II (PB)

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