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Item Details
Title: CHEMICAL VAPOR DEPOSITION POLYMERIZATION
THE GROWTH AND PROPERTIES OF PARYLENE THIN FILMS
By: Jeffrey B. Fortin, Toh-Ming Lu
Format: Hardback

List price: £133.00


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ISBN 10: 1402076886
ISBN 13: 9781402076886
Publisher: SPRINGER-VERLAG NEW YORK INC.
Pub. date: 30 November, 2003
Edition: 2004 ed.
Pages: 102
Description: Provides information on the deposition process and equipment, and on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. This book includes methods to characterize a deposition system's pumping properties and monitor the deposition process via mass spectrometry.
Synopsis: Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.
Illustrations: XVII, 102 p.
Publication: US
Imprint: Springer-Verlag New York Inc.
Returns: Returnable
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