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Item Details
| Title:
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3D IC DEVICES, TECHNOLOGIES, AND MANUFACTURING
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| By: |
Hong Xiao (Editor) |
| Format: |
Paperback |
| List price:
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£66.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
1510601465 |
| ISBN 13: |
9781510601468 |
| Publisher: |
SPIE PRESS |
| Pub. date: |
30 April, 2016 |
| Series: |
SPIE Press Monographs |
| Pages: |
220 |
| Synopsis: |
The process of scaling integrated circuit (IC) chips has become more challenging as the feature size has been pushed into nanometer-technology nodes. In order to extend the scaling, engineers and scientists have attempted to not only shrink the feature size in x and y directions but also push IC devices into the third dimension. This book discusses the advantages of 3D devices and their applications in dynamic random access memory (DRAM), 3D-NAND flash, and advanced-technology-node CMOS ICs. Topics include the development of DRAM cell transistors and storage node capacitors; the manufacturing process of advanced buried-word-line DRAM; 3D FinFET CMOS IC devices; scaling trends of CMOS logic; devices that may be used in the "post-CMOS" era; and 3D technologies, such as the 3D-wafer process integration of silicon-on-ILD and TSV-based 3D packaging. |
| Publication: |
US |
| Imprint: |
SPIE Press |
| Returns: |
Returnable |
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