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Item Details
| Title:
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CMOS FRONT-END MATERIALS AND PROCESS TECHNOLOGY: VOLUME 765
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| By: |
Tsu-Jae King (Editor), Bin Yu (Editor), Robert J. P. Lander (Editor) |
| Format: |
Hardback |
| List price:
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£21.99 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
1558997024 |
| ISBN 13: |
9781558997028 |
| Publisher: |
MATERIALS RESEARCH SOCIETY |
| Pub. date: |
12 September, 2003 |
| Series: |
MRS Proceedings |
| Pages: |
308 |
| Description: |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
| Synopsis: |
In the future, because fundamental materials and process limits are being approached, continued transistor scaling will not be as straightforward. Future complementary metal-oxide semiconductor (MOS) transistors will require high-permittivity (high-k) gate dielectrics and metal gate electrodes, as well as low-resistance ultrashallow junctions, in order to meet the stringent specifications of the International Technology Roadmap for Semiconductors. Techniques to improve transconductance and drive current may also be required. Process integration issues must be solved, and reliability must be assured, before any new material or processing technique can be used in IC manufacture. A further complication is that the key challenges will differ according to application. This book reports research results from industry, government labs and academia covering a wide scope of front-end process issues for future CMOS technologies.Topics include: advanced materials and structures; high-k dielectrics; advanced gate stack materials; heterogeneous integration and strained Si technologies; ultrashallow junction technology; strained Si and source/drain technology; and laser annealing and silicide processes. |
| Illustrations: |
illustrations |
| Publication: |
US |
| Imprint: |
Materials Research Society |
| Returns: |
Returnable |
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Ramadan and Eid al-Fitr
A celebratory, inclusive and educational exploration of Ramadan and Eid al-Fitr for both children that celebrate and children who want to understand and appreciate their peers who do.
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