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Item Details
| Title:
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CHEMICAL-MECHANICAL PLANARIZATION: VOLUME 867
INTEGRATION, TECHNOLOGY AND RELIABILITY |
| By: |
E. C. Johns (Editor), A. Kumar (Editor), J. A. Lee (Editor) |
| Format: |
Hardback |
| List price:
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£20.99 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
1558998209 |
| ISBN 13: |
9781558998209 |
| Publisher: |
MATERIALS RESEARCH SOCIETY |
| Pub. date: |
19 July, 2005 |
| Series: |
MRS Proceedings |
| Pages: |
302 |
| Description: |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
| Synopsis: |
Technology requirements associated with the progressive scaling of devices for future technology nodes, coupled with the aggressive introduction of new materials, places tremendous demands on chemical-mechanical polishing. The goal of this 2005 book, which is part of a popular series from MRS, is to bring together experts from a broad spectrum of research and technology groups currently working on CMP, to review advances made, and to offer a comprehensive discussion of future challenges that must be overcome. The book shows trends in the development of consumables, process modules, tool designs, process integration, modeling, defect characterization, and metrology. Topics include: planarization processes and applications; consumables -CMP pads and slurries; CMP equipment and metrology; and CMP modeling and simulation. |
| Illustrations: |
illustrations |
| Publication: |
US |
| Imprint: |
Materials Research Society |
| Returns: |
Returnable |
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