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Item Details
Title: MEMS MECHANICAL SENSORS
By: Steve P. Beeby, Graham Ensel, Michael E. Kraft
Format: Hardback

List price: £84.00


We currently do not stock this item, please contact the publisher directly for further information.

ISBN 10: 1580535364
ISBN 13: 9781580535366
Publisher: ARTECH HOUSE PUBLISHERS
Pub. date: 30 April, 2004
Pages: 284
Description: The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
Synopsis: The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
Illustrations: 1, black & white illustrations
Publication: US
Imprint: Artech House Publishers
Returns: Non-returnable
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