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Item Details
| Title:
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MEMS MECHANICAL SENSORS
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| By: |
Steve P. Beeby, Graham Ensel, Michael E. Kraft |
| Format: |
Hardback |
| List price:
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£84.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
1580535364 |
| ISBN 13: |
9781580535366 |
| Publisher: |
ARTECH HOUSE PUBLISHERS |
| Pub. date: |
30 April, 2004 |
| Pages: |
284 |
| Description: |
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices. |
| Synopsis: |
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices. |
| Illustrations: |
1, black & white illustrations |
| Publication: |
US |
| Imprint: |
Artech House Publishers |
| Returns: |
Non-returnable |
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