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Item Details
| Title:
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CMOS GATE-STACK SCALING - MATERIALS, INTERFACES AND RELIABILITY IMPLICATIONS: VOLUME 1155
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| By: |
Alexander A. Demkov (Editor), Bill Taylor (Editor), H. Rusty Harris (Editor) |
| Format: |
Hardback |
| List price:
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£94.00 |
| Our price: |
£84.60 |
| Discount: |
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| You save:
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£9.40 |
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| ISBN 10: |
1605111287 |
| ISBN 13: |
9781605111285 |
| Availability: |
Usually dispatched within 1-3 weeks.
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| Stock: |
Currently 0 available |
| Publisher: |
MATERIALS RESEARCH SOCIETY |
| Pub. date: |
19 November, 2009 |
| Series: |
MRS Proceedings |
| Pages: |
194 |
| Description: |
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
| Synopsis: |
To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials. |
| Illustrations: |
Illustrations |
| Publication: |
US |
| Imprint: |
Materials Research Society |
| Returns: |
Returnable |
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