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Item Details
| Title:
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HANDBOOK OF WAFER BONDING
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| By: |
Peter Ramm (Editor), James Jian-Qiang Lu (Editor), Maaike M. V. Taklo (Editor) |
| Format: |
Electronic book text |
| List price:
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£144.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
3527644253 |
| ISBN 13: |
9783527644254 |
| Publisher: |
JOHN WILEY AND SONS LTD |
| Pub. date: |
28 November, 2011 |
| Pages: |
425 |
| Synopsis: |
The focus behind this book on wafer bonding is the fast paced changes in the research and development in three-dimensional (3D) integration, temporary bonding and micro-electro-mechanical systems (MEMS) with new functional layers. Written by authors and edited by a team from microsystems companies and industry-near research organizations, this handbook and reference presents dependable, first-hand information on bonding technologies. Part I sorts the wafer bonding technologies into four categories: Adhesive and Anodic Bonding; Direct Wafer Bonding; Metal Bonding; and Hybrid Metal/Dielectric Bonding. Part II summarizes the key wafer bonding applications developed recently, that is, 3D integration, MEMS, and temporary bonding, to give readers a taste of the significant applications of wafer bonding technologies. This book is aimed at materials scientists, semiconductor physicists, the semiconductor industry, IT engineers, electrical engineers, and libraries. |
| Publication: |
UK |
| Imprint: |
Wiley-VCH Verlag GmbH |
| Returns: |
Non-returnable |
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