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Item Details
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NANOLITHOGRAPHY: A BORDERLAND BETWEEN STM, EB, IB, AND X-RAY LITHOGRAPHIES
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| By: |
Massimo Gentili (Editor), Carlo Giovannella (Editor), Stefano Selci (Editor) |
| Format: |
Paperback |
| List price:
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£207.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
9048143888 |
| ISBN 13: |
9789048143887 |
| Publisher: |
SPRINGER |
| Pub. date: |
5 December, 2010 |
| Edition: |
1st ed. Softcover of orig. ed. 1994 |
| Series: |
NATO Science Series E: 264 |
| Pages: |
228 |
| Description: |
Proceedings of the NATO Advanced Research Workshop, Frascati, Roma, Italy, April 6--8, 1993 |
| Synopsis: |
Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL). |
| Illustrations: |
biography |
| Publication: |
Netherlands |
| Imprint: |
Springer |
| Returns: |
Returnable |
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