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Item Details
| Title:
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EXTREME ULTRAVIOLET LITHOGRAPHY
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| By: |
Banqiu Wu, Ajay Kumar |
| Format: |
Hardback |
| List price:
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£116.99 |
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We believe that this item is permanently unavailable, and so we cannot source
it.
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| ISBN 10: |
0071549188 |
| ISBN 13: |
9780071549189 |
| Publisher: |
MCGRAW-HILL EDUCATION - EUROPE |
| Pub. date: |
1 May, 2009 |
| Series: |
Electronics |
| Pages: |
482 |
| Description: |
Explains the most promising innovation in microlithography today |
| Synopsis: |
Master Extreme Ultraviolet Lithography Techniques Produce high-density, ultrafast microchips using the latest EUVL methods. Written by industry experts, Extreme Ultraviolet Lithography details the equipment, materials, and procedures required to radically extend fabrication capabilities to wavelengths of 32 nanometers and below. Work with masks and resists, configure high-reflectivity mirrors, overcome power and thermal challenges, enhance resolution, and minimize wasted energy. You will also learn how to use Mo/Si deposition technology, fine-tune performance, and optimize cost of ownership. Design EUVL-ready photomasks, resist layers, and source-collector modules Assemble optical components, mirrors, microsteppers, and scanners Harness laser-produced and discharge pulse plasma sources Enhance resolution using proximity correction and phase-shift Generate modified illumination using holographic elements Measure critical dimensions using metrology and scatterometry Deploy stable Mo/Si coatings and high-sensitivity multilayers Handle mask defects, layer imperfections, and thermal instabilities |
| Illustrations: |
black & white illustrations, black & white tables, figures |
| Publication: |
US |
| Imprint: |
McGraw-Hill Professional |
| Returns: |
Returnable |
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Encyclopedia of Electronic Components: Sensors for Location, Presence, Proximity, Orientation, Oscillation, Force, Load, Human Input, Liquid and Gas Properties, Light, Heat, Sound, and Electricity (Paperback)
O'Reilly Media, Inc, USA
Our Price :
£17.51
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Taylor Swift (Little People, Big Dreams)
Inspire kids with the glittering story of pop superstar Taylor Swift! This talented singer-songwriter started as a little country girl with a big dream to become a star.
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