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Item Details
| Title:
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RESONANT MEMS
FUNDAMENTALS, IMPLEMENTATION, AND APPLICATION |
| By: |
Oliver Brand (Editor), Isabelle Dufour (Editor), Stephen D. Heinrich (Editor) |
| Format: |
Hardback |
| List price:
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£140.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
3527335455 |
| ISBN 13: |
9783527335459 |
| Publisher: |
WILEY-VCH VERLAG GMBH |
| Pub. date: |
22 April, 2015 |
| Series: |
Advanced Micro and Nanosystems |
| Pages: |
512 |
| Description: |
A must-have for any MEMS R&D group: for the first time vital and hard-to-come-by knowledge is combined in one ready reference. From the principles and implementations, the book presents a unified view of resonant MEMS and their applications rather than unrelated case studies. |
| Synopsis: |
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems. |
| Publication: |
Germany |
| Imprint: |
Wiley-VCH Verlag GmbH |
| Returns: |
Returnable |
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