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Item Details
| Title:
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ENABLING TECHNOLOGIES FOR MEMS AND NANODEVICES
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| By: |
Henry Baltes (Editor), Oliver Brand (Editor), Gary K. Fedder (Editor) |
| Format: |
Paperback |
| List price:
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£75.00 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
352733498X |
| ISBN 13: |
9783527334988 |
| Publisher: |
WILEY-VCH VERLAG GMBH |
| Pub. date: |
17 April, 2013 |
| Pages: |
439 |
| Description: |
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. |
| Synopsis: |
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively. |
| Publication: |
Germany |
| Imprint: |
Wiley-VCH Verlag GmbH |
| Returns: |
Returnable |
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