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Item Details
| Title:
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CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005
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| Volume: |
2005 |
| By: |
David G. Seiler (Editor), Alain C. Diebold (Editor), Robert McDonald (Editor) |
| Format: |
Hardback |
| List price:
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£235.50 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
0735402779 |
| ISBN 13: |
9780735402775 |
| Publisher: |
AMERICAN INSTITUTE OF PHYSICS |
| Pub. date: |
1 September, 2005 |
| Series: |
AIP Conference Proceedings v.788 |
| Pages: |
687 |
| Description: |
Summarizes major issues and gives reviews of important measurement techniques that are crucial to the advances in semiconductor technology. This book covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. |
| Synopsis: |
The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise. |
| Publication: |
US |
| Imprint: |
American Institute of Physics |
| Returns: |
Non-returnable |
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