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Item Details
| Title:
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HANDBOOK OF SILICON SEMICONDUCTOR METROLOGY
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| By: |
Alain C. Diebold (Editor) |
| Format: |
Electronic book text |
| List price:
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£178.00 |
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We believe that this item is permanently unavailable, and so we cannot source
it.
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| ISBN 10: |
113555482X |
| ISBN 13: |
9781135554828 |
| Publisher: |
TAYLOR & FRANCIS LTD |
| Pub. date: |
29 June, 2001 |
| Synopsis: |
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies. |
| Publication: |
UK |
| Imprint: |
CRC Press |
| Returns: |
Non-returnable |
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