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Item Details
Title: FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS
2007 INTERNATIONAL CONFERENCE ON FRONTIERS OF CHARACTERIZATION AND METROLOGY
By: David G. Seiler (Editor), Alain C. Diebold (Editor), Robert McDonald (Editor)
Format: Mixed media product

List price: £126.48


We currently do not stock this item, please contact the publisher directly for further information.

ISBN 10: 0735404410
ISBN 13: 9780735404410
Publisher: AMERICAN INSTITUTE OF PHYSICS
Pub. date: 1 September, 2007
Edition: 2007 ed.
Series: AIP Conference Proceedings / Materials Physics and Applications v. 931
Pages: 592
Description: Frontiers of Characterization and Metrology for Nanoelectronics
Synopsis: This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.
Illustrations: Illustrations (some col.)
Publication: US
Imprint: American Institute of Physics
Returns: Non-returnable
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