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Item Details
| Title:
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CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 1998 INTERNATIONAL CONFERENCE, 23-27 MARCH 1998
NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, GAITHERSBURG MD, USA |
| By: |
David G. Seiler (Editor), A.C. Diebold (Editor), W.M. Bullis (Editor) |
| Format: |
Mixed media product |
| List price:
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£245.50 |
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We currently do not stock this item, please contact the publisher directly for
further information.
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| ISBN 10: |
1563967537 |
| ISBN 13: |
9781563967535 |
| Publisher: |
AMERICAN INSTITUTE OF PHYSICS |
| Series: |
AIP Conference Proceedings v.449 |
| Pages: |
1025 |
| Synopsis: |
The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely. |
| Illustrations: |
illustrations |
| Publication: |
US |
| Imprint: |
American Institute of Physics |
| Returns: |
Non-returnable |
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